Since 1972 - the Best Source for Fluid Handling Products


Filtration Systems:

Wet Etch Modules by FilterChem™

    Available Features:
  • Available in Polypropylene, PVDF, PFA and 316 stainless steel
  • Single or four-sided overflow
  • All molded tank construction with Integral Sparger/Boat Rack
  • Removable inner tank
  • Heat exchange coils located out of etch area for remote circulator
  • Available for 2" through 12" wafers or custom applications
    Additional Features:
  • Teflon or PVDF heat exchange coils
  • Teflon heater and control
  • Digital flow meter to read GPM through filter element
  • Process timers
  • Nitrogen blanket and bubbler for developer
  • Temperature monitors and probes
  • Custom modules and tanks to fit your needs

Wet Etch Module
Part # Capacity
EDM-4F 4.02 gallons / 15.22 liters - 2, 4" carriers
EDM-5F 5.31 gallons / 20.10 liters - 2, 5" carriers
EDM-6F 6.59 gallons / 24.95 liters - 2, 6" carriers
EDM-4SF 3.49 gallons / 13.21 liters - 1, 4" carriers
EDM-5SF 3.90 gallons / 14.76 liters - 1, 5" carriers
EDM-6SF 4.18 gallons / 15.83 liters - 1, 6" carriers
EDM-8SF 7.57 gallons / 28.66 liters - 1, 8" carriers
Model
Dimension EDM-4F EDM-5F EDM-6F EDM-4SF EDM-5SF EDM-6SF EDM-8SF
A 21.50 26.00 26.00 18.50 18.50 18.50 18.50
B 19.50 23.50 23.50 16.00 16.00 16.00 16.00
C 10.875 13.187 15.875 8"SQ 8"SQ 8"SQ 8"SQ
D 5.25 6.75 7.75 5.25 6.75 7.75 9.00

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