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Filtration Systems:
Wet Etch Modules by FilterChem™
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Available Features:
- Available in Polypropylene, PVDF, PFA and 316 stainless steel
- Single or four-sided overflow
- All molded tank construction with Integral Sparger/Boat Rack
- Removable inner tank
- Heat exchange coils located out of etch area for remote circulator
- Available for 2" through 12" wafers or custom applications
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Additional Features:
- Teflon or PVDF heat exchange coils
- Teflon heater and control
- Digital flow meter to read GPM through filter element
- Process timers
- Nitrogen blanket and bubbler for developer
- Temperature monitors and probes
- Custom modules and tanks to fit your needs
| Wet Etch Module |
| Part # |
Capacity |
| EDM-4F |
4.02 gallons / 15.22 liters - 2, 4" carriers |
| EDM-5F |
5.31 gallons / 20.10 liters - 2, 5" carriers |
| EDM-6F |
6.59 gallons / 24.95 liters - 2, 6" carriers |
| EDM-4SF |
3.49 gallons / 13.21 liters - 1, 4" carriers |
| EDM-5SF |
3.90 gallons / 14.76 liters - 1, 5" carriers |
| EDM-6SF |
4.18 gallons / 15.83 liters - 1, 6" carriers |
| EDM-8SF |
7.57 gallons / 28.66 liters - 1, 8" carriers |
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Model |
| Dimension |
EDM-4F |
EDM-5F |
EDM-6F |
EDM-4SF |
EDM-5SF |
EDM-6SF |
EDM-8SF |
| A |
21.50 |
26.00 |
26.00 |
18.50 |
18.50 |
18.50 |
18.50 |
| B |
19.50 |
23.50 |
23.50 |
16.00 |
16.00 |
16.00 |
16.00 |
| C |
10.875 |
13.187 |
15.875 |
8"SQ |
8"SQ |
8"SQ |
8"SQ |
| D |
5.25 |
6.75 |
7.75 |
5.25 |
6.75 |
7.75 |
9.00 |
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